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 | | From: | Arthur Beyder | | Subject: | capacitance sensing displacement meter | | Date: | 20 Dec 2004 17:38:06 GMT |
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Does anyone have a good reference for MEMS fabrication of a capacitative
displacement meter. i need to measure movement ~0.1nm
Thanks,
Arthur
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| | From: | Jon Elson | | Subject: | Re: capacitance sensing displacement meter | | Date: | 23 Dec 2004 04:30:22 GMT |
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Arthur Beyder wrote:
>Does anyone have a good reference for MEMS fabrication of a capacitative
> displacement meter. i need to measure movement ~0.1nm
>
>
Look up the common techniques used for accelerometers. There are loads of
companies making them, from sensitive instruments to air bag sensors.
They all use some form of sensitive position detection with a proof mass.
Most use an interdigitated capacitive displacement sensor, some, maybe most,
are differential. You could make a very similar setup, you just don't
need the
proof mass on there. 0.1 nm is pretty sensitive, but that may well be
reasonable
to do.
Jon
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